Solar masero

Solar masero akakamurwa kuva crystalline silicon uye amorphous silicon, pakati peiyo crystalline silicon masero anogona kuwedzera kukamurwa kuva monocrystalline masero uye polycrystalline masero;kushanda kwesilicon yemonocrystalline kwakasiyana neiyo yecrystalline silicon.

Classification:

Iwo anowanzo shandiswa solar crystalline silicon masero muChina anogona kukamurwa kuita:

Single crystal 125 * 125

Single crystal 156 * 156

Polycrystalline 156 * 156

Single crystal 150 * 150

Single crystal 103*103

Polycrystalline 125 * 125

Manufacturing process:

Kugadzirwa kwemasero ezuva akakamurwa kuita silicon wafer inspection - surface texturing uye pickling - diffusion junction - dephosphorization silicon girazi - plasma etching uye pickling - anti-reflection coating - screen printing - Rapid sintering, etc. Mashoko acho ndeaya anotevera:

1. Silicon wafer yekuongorora

Silicon wafers ndivo vatakuri vemasero ezuva, uye mhando yesilicon wafers inotarisisa zvakananga kutendeuka kwesimba resolar maseru.Naizvozvo, zvinodikanwa kuti uongorore anouya esilicon wafers.Iyi nzira inonyanya kushandiswa paInternet kuyerwa kweimwe michina parameters yesilicon wafers, izvi parameters kunyanya zvinosanganisira wafer pamusoro kusaenzana, vashoma mutakuri upenyu hwose, resistivity, P/N mhando uye microcracks, etc. Iri boka remidziyo rakakamurwa kuita otomatiki kurodha uye kurodha. , silicon wafer transfer, system yekubatanidza chikamu uye mana ekuona mamodule.Pakati pavo, iyo photovoltaic silicon wafer detector inoona kusaenzana kwepamusoro pechifukidzo chesilicon, uye panguva imwe chete inoona maitiro ekuonekwa akadai sehukuru uye diagonal yesilicon wafer;iyo micro-crack yekuongorora module inoshandiswa kuona mukati me micro-cracks yesilicon wafer;uyezve, kune maviri Detection modules, imwe ye online test modules inonyanya kushandiswa kuyedza iyo yakawanda resistivity yesilicon wafers uye rudzi rwesilicon wafers, uye imwe module inoshandiswa kuona vashoma mutakuri hupenyu hwesilicon wafers.Pamberi pekuonekwa kwevashoma mutakuri hupenyu hwese uye resistivity, zvinodikanwa kuti uone diagonal uye micro-kutsemuka kwesilicon wafer, uye otomatiki kubvisa yakakuvadzwa silicon wafer.Silicon wafer yekuongorora michina inogona kurodha uye kuburitsa wafers, uye inogona kuisa zvigadzirwa zvisina kukodzera munzvimbo yakagadziriswa, nekudaro ichivandudza huchokwadi hwekuongorora uye kushanda nesimba.

2. Surface textured

Kugadzirira kwemonocrystalline silicon manyorerwo ndiko kushandisa anisotropic etching yesilicon kuumba mamirioni emapiramidhi etetrahedral, kureva, zvimiro zvepiramidhi, pamusoro peimwe sikweya centimita yesilicon.Nekuda kwekuratidzira kwakawanda uye kudzokororwa kwechiedza chechiitiko pamusoro pepamusoro, kunyura kwechiedza kunowedzera, uye pfupi-yedunhu ikozvino uye kutendeuka kwekuita kwebhatiri kunovandudzwa.Iyo anisotropic etching mhinduro yesilicon kazhinji inopisa alkaline mhinduro.Ma alkalis aripo sodium hydroxide, potassium hydroxide, lithium hydroxide uye ethylenediamine.Yakawanda yesilicon ye suede inogadzirwa nekushandisa isingadhure dilute mhinduro ye sodium hydroxide ine muunganidzwa we1%, uye etching tembiricha i70-85 ° C.Kuti uwane suede yunifomu, madoro akadai se ethanol uye isopropanol anofanirwawo kuwedzerwa kune mhinduro seanogadzirisa agent kuti akurumidze kuparara kwesilicon.Iyo suede isati yagadzirwa, iyo silicon wafer inofanirwa kuiswa pasi pekutanga etching pamusoro, uye inenge 20-25 μm inoiswa nealkaline kana acidic etching mhinduro.Mushure mokunge suede yakasimbiswa, kucheneswa kwemakemikari kunoitwa.Iyo yepamusoro-yakagadzirirwa silicon wafers haifanirwe kuchengetwa mumvura kwenguva yakareba kudzivirira kusvibiswa, uye inofanirwa kuparadzirwa nekukurumidza sezvinobvira.

3. Diffusion knot

Solar masero anoda nzvimbo yakakura yePN junction kuti aone kutendeuka kwesimba rechiedza kune simba remagetsi, uye diffusion furnace chinhu chakakosha chekugadzira PN junction yemasero ezuva.Iyo tubular diffusion furnace inonyanya kuumbwa nezvikamu zvina: kumusoro uye pasi zvikamu zvechikepe chequartz, kamuri yekuburitsa gasi, chikamu chemuviri wechoto uye gasi kabati chikamu.Diffusion kazhinji inoshandisa phosphorus oxychloride mvura sosi seyekuparadzira sosi.Isa P-type silicon wafer mugaba requartz re tubular diffusion virace, uye shandisa nitrogen kuunza phosphorus oxychloride mugaba requartz patembiricha yepamusoro inosvika 850-900 degrees Celsius.Iyo phosphorus oxychloride inopindirana nesilicon wafer kuti iwane phosphorus.atomu.Mushure meimwe nguva yenguva, maatomu ephosphorous anopinda pamusoro peiyo silicon wafer kubva kumativi ese, uye kupinda nekupararira musilicon wafer kuburikidza nemumikaha pakati peatomu resilicon, ichigadzira chinongedzo pakati peN-mhando semiconductor neP- nyora semiconductor, kureva, iyo PN junction.Iyo PN junction inogadzirwa neiyi nzira ine yakanaka kufanana, iyo isiri-yakaenzana yeshiti kuramba isingasviki 10%, uye vashoma vanotakura hupenyu hwese hunogona kupfuura 10ms.Kugadzirwa kwePN junction ndiyo inonyanya kukosha uye yakakosha maitiro mukugadzira solar cell.Nokuti ndiko kuumbwa kwePN junction, ma electrons nemakomba haadzokeri kunzvimbo dzazvo dzepakutanga mushure mekuyerera, kuitira kuti ikozvino inoumbwa, uye ikozvino inobudiswa kunze netambo, iyo yakananga ikozvino.

4. Dephosphorylation silicate girazi

Iyi nzira inoshandiswa mukugadzirwa kwemasero ezuva.Nekemikari etching, iyo silicon wafer inonyudzwa muhydrofluoric acid mhinduro kugadzira kemikari kuita kuti igadzire inonyungudika yakaoma kompani hexafluorosilicic acid kubvisa iyo diffusion system.Iro yegirazi yephosphosilicate yakaumbwa pamusoro peiyo silicon wafer mushure mekusangana.Munguva yekuparadzira, POCL3 inopindirana neO2 kuumba P2O5 iyo inoiswa pamusoro peiyo silicon wafer.P2O5 inopindirana neSi kuti ibudise SiO2 uye maatomu ephosphorus, Nenzira iyi, mutsetse weSiO2 une phosphorus zvinhu unoumbwa pamusoro pesilicon wafer, iyo inonzi phosphosilicate glass.Midziyo yekubvisa phosphorous silicate girazi inowanzo umbwa nemuviri mukuru, tangi yekuchenesa, servo drive system, mechanical ruoko, magetsi ekudzora system uye otomatiki acid yekugovera sisitimu.Iwo makuru emagetsi masosi ihydrofluoric acid, nitrogen, mhepo yakamanikidzwa, mvura yakachena, kupisa kunopisa mhepo uye tsvina yemvura.Hydrofluoric acid inonyungudutsa silica nekuti hydrofluoric acid inopindirana nesilica kuti igadzire gasi rinoputika resilicon tetrafluoride.Kana iyo hydrofluoric asidhi yakawandisa, iyo silicon tetrafluoride inogadzirwa nemhinduro inozowedzera kuita neiyo hydrofluoric acid kuti igadzire soluble complex, hexafluorosilicic acid.

5. Plasma etching

Sezvo panguva yekuparadzira maitiro, kunyangwe kana kudzokororwa-kumashure-kumashure kuchigamuchirwa, phosphorus inozopararira pane ese maficha kusanganisira mipendero yesilicon wafer.Maerekitironi anogadzirwa nemifananidzo akaunganidzwa kudivi rekumberi kwemuchinjiko wePN achayerera achitevedza kumucheto uko phosphorus inoparadzirwa kudivi rekuseri kwePN junction, zvichiita kuti dunhu ripfupi.Naizvozvo, iyo doped silicon yakatenderedza solar cell inofanirwa kusungirirwa kuti ibvise iyo PN junction pamucheto wesero.Iyi nzira inowanzoitwa uchishandisa plasma etching matekiniki.Plasma etching iri munzvimbo yakaderera yekumanikidza, mamorekuru eiyo reactive gasi CF4 anonakidzwa neredhiyo frequency simba kugadzira ionization uye kuumba plasma.Plasma inoumbwa nemaerekitironi anochajiswa uye ayoni.Pasi pesimba remaerekitironi, gasi riri mukamuri rekuita rinokwanisa kutora simba uye kuumba nhamba huru yemapoka anoshanda mukuwedzera pakushandurwa kuita maion.Mapoka anoshanda anoshanda anosvika pamusoro peSiO2 nekuda kwekupararira kana pasi pechiito chemunda wemagetsi, kwaanoita chemikemikari nepamusoro pechinhu chinosungirirwa, uye kugadzira zvigadzirwa zvinoputika zvinopatsanura kubva pamusoro pechinhu chinofanirwa kuve. etched, uye anopombwa kunze kwegomba neiyo vacuum system.

6. Anti-reflection coating

The reflectivity of the polished silicon surface is 35%.Kuti uderedze kutaridzika kwepamusoro uye uvandudze kushandura kwakanaka kwesero, zvinodikanwa kuisa chidimbu chesilicon nitride anti-reflection firimu.Mukugadzirwa kwemaindasitiri, PECVD michina inowanzoshandiswa kugadzirira anti-reflection mafirimu.PECVD inonzi plasma inosimudzira makemikari vapor deposition.Nheyo yayo yehunyanzvi ndeyekushandisa yakaderera-tembiricha plasma sesimba sosi, sampu inoiswa pane cathode yeinopenya inoyerera pasi pekumanikidzwa kwakadzika, kubuda kunopenya kunoshandiswa kupisa sampuli kune tembiricha yakafanotemerwa, uyezve huwandu hwakakodzera hwe. reactive magasi SiH4 uye NH3 anounzwa.Mushure mekutevedzana kwemakemikari maitiro uye plasma maitiro, yakasimba-nyika firimu, kureva, silicon nitride firimu, inoumbwa pamusoro peiyo sampuli.Kazhinji, ukobvu hwefirimu hwakaiswa neiyi plasma-enhanced chemical vapor deposition method inenge 70 nm.Mafirimu ehukobvu uhu ane mashandiro ekuona.Uchishandisa musimboti wekukanganisa kwemufirimu mutete, kuratidzwa kwechiedza kunogona kuderedzwa zvakanyanya, iyo pfupi-yedunhu ikozvino uye kubuda kwebhatiri kunowedzera zvakanyanya, uye kushanda zvakanaka kunovandudzwawo zvakanyanya.

7. screen kudhinda

Mushure mekunge sero rezuva rapfuura nemaitiro ekutumira mameseji, kupararira uye PECVD, iyo PN junction yakaumbwa, iyo inogona kugadzira ikozvino pasi pekuvhenekerwa.Kuti utengese kunze iyo yakagadzirwa ikozvino, zvinodikanwa kuita zvakanaka uye zvisina kunaka electrodes pamusoro pebhatiri.Kune nzira dzakawanda dzekugadzira maelectrode, uye kudhinda skrini ndiyo inonyanya kufarirwa maitiro ekugadzira solar cell electrode.Kudhinda skrini ndeyekudhinda yakafanotemerwa pateni pane substrate nenzira yekuisa embossing.Midziyo iyi ine zvikamu zvitatu: sirivheri-aluminium paste kudhinda kuseri kwebhatiri, aruminiyamu paste kudhinda kuseri kwebhatiri, uye sirivheri-namira kudhinda kumberi kwebhatiri.Nheyo yayo yekushanda ndeye: shandisa mesh yepeteni yescreen kupinda mukati me slurry, shandisa imwe dzvinyiriro pane slurry chikamu chechidzitiro ne scraper, uye famba uchienda kune rumwe rutivi rwechidzitiro panguva imwe chete.Iyo inki inosvinwa kubva kumambure eiyo graphic chikamu ichienda kune substrate ne squeegee painofamba.Nekuda kweiyo viscous effect ye paste, iyo imprint inogadziriswa mukati meimwe nhanho, uye iyo squeegee inogara iri mumutsara wakatarisana neiyo skrini yekudhinda ndiro uye substrate panguva yekudhinda, uye mutsara wekusangana unofamba nekufamba kwe squeegee kupedzisa. kudhinda sitiroko.

8. kukurumidza sintering

Iyo skrini-yakadhindwa silicon wafer haigone kushandiswa zvakananga.Inoda kukurumidza kunyudzwa muchoto chinopisa kuti upise iyo organic resin binder, ichisiya anenge akachena esirivha maelectrodes akanyatso kunamatira kune silicon wafer nekuda kwekuita kwegirazi.Kana tembiricha yesirivheri electrode uye crystalline silicon ichisvika pakupisa kweeutectic, maatomu ecrystalline silicon anobatanidzwa mune yakanyungudutswa sirivheri electrode zvinhu mune imwe chikamu, nekudaro achigadzira iyo ohmic kusangana kwepamusoro nepasi maelectrode, uye nekuvandudza dunhu rakavhurika. voltage uye kuzadza chinhu chesero.Iyo yakakosha parameter ndeyekuita kuti ive nemaitiro ekupikisa kuti uvandudze kushandurwa kwesero.

Choto chekupisa chakakamurwa kuita matanho matatu: pre-sintering, sintering, uye kutonhora.Chinangwa cheiyo pre-sintering nhanho ndeyekuora uye kupisa iyo polymer binder mu slurry, uye tembiricha inokwira zvishoma nezvishoma panguva ino;muSintering stage, maitiro akasiyana-siyana emuviri uye emakemikari anopedzwa mumuviri wakanyoroveswa kuti aumbe bhaisikopo rinopikisa, richiita kuti rinyatsopikisa., tembiricha inosvika pakakwirira padanho iri;muchikamu chekutonhora uye kutonhora, girazi rinonyoroveswa, rakaomeswa uye rakasimbiswa, kuitira kuti resitive film structure inosungirirwa zvakasimba kune substrate.

9. Peripherals

Mukuita kwekugadzirwa kwesero, zvivakwa zvekutenderera senge magetsi, magetsi, mvura, dhizaini, HVAC, vacuum, uye yakakosha steam inodiwa zvakare.Dziviriro yemoto uye midziyo yekudzivirira kwezvakatipoteredza inonyanya kukosha kuve nechokwadi chekuchengetedza uye kusimudzira kwakasimba.Kune tambo yekugadzira masero ezuva ane gore negore kubuda kwe50MW, kushandiswa kwesimba kwemaitiro uye magetsi ega angangoita 1800KW.Huwandu hwekuita mvura yakachena hunosvika matani gumi nemashanu paawa, uye zvinodiwa zvemhando yemvura zvinosangana neEW-1 tekinoroji mwero weChina wemagetsi giredhi mvura GB/T11446.1-1997.Huwandu hwemvura yekutonhodza mvura inokwana matani gumi nemashanu paawa, saizi yemhando yemvura haifanire kunge yakakura kupfuura 10 microns, uye tembiricha yemvura inofanira kunge iri 15-20 ° C.Iyo vacuum exhaust vhoriyamu inenge 300M3/H.Panguva imwecheteyo, anenge 20 cubic metres ematangi ekuchengetedza nitrogen uye gumi cubic metres ematangi ekuchengetedza okisijeni anodiwawo.Tichifunga nezve kuchengetedza zvinhu zvegasi rakakosha senge silane, zvinodikanwa zvakare kumisikidza yakakosha gasi kamuri kuti ive nechokwadi chekuchengetedzwa kwekugadzirwa.Pamusoro pezvo, shongwe dzekupisa silane uye zviteshi zvekuchenesa tsvina zvakare zvivakwa zvinodiwa pakugadzirwa kwesero.